7.15 MetalTop (Thickness 6K/9K*/11K* Å)

MetalTop RULES

RULE NO.

DESCRIPTION

LAYOUT RULE

Layer

MT — MetalTop

MT.1

Width

0.36/0.44*

MT.2a

Space

0.38/0.46*

MT.2b

Space between wide (length & width > 10um) MetalTop

0.50/0.60*

MT.3

MetalTop coverage over the entire die shall be >30%

(Refer to section 10.3 for Dummy Metal-fill guidelines. Customer needs

to ensure enough dummy metal to satisfy Metaln coverage)

MT.4

Minimum MetalTop area

0.5625μm2

Note

* For 9K/11K Å MetalTop.

MetalTop (Thickness 6K/9K*/11K* Å)