7.14 Vian (where n = 1 to 5)¶
RULE NO. |
DESCRIPTION |
LAYOUT RULE |
Layer |
Vn — Vian (where n = 1 to 5) |
|
Vn.1 |
Min/max Vian size (1 <= n <= 5) |
0.26 |
Vn.2a |
Space (1 <= n <= 5) |
0.26 |
Vn.2b |
Vian Space in 4x4 or larger Vian array |
0.36 |
Vn.3 |
Metaln (where n=1 to 5) overlap of Vian
variation (guideline)* |
0.00 (n = 1) 0.01 (2 <= n <= 5) 0.06 0.06 0.12 |
Vn.4 |
Metal [n+1] overlap of Vian
variation (guideline)* |
0.01 0.06 0.06 0.12 |
Vn.5* |
Vian stack (2) over contact is permitted |
Note
Note
Applies to all < 0.34μm wide Metal lines, excluding Metal branches shorter than 0.28μm.
Vian is stacked if any portion of it intersects Via [n+1] or Via [n-1], or contact if n=1.
For better yield and reliability try to avoid single vias on any layer (put multiple).