10.4.2 MIM Option B¶
This section describes rules for MiM (Metal-insulator-Metal) capacitor if MIM capacitor needs to be placed between “Top metal” & “Top metal-1”. FuseTop layer still used to defines the top plate of MiM capacitor and Metaln-1 layer defines MiM bottom plate (n>2, n is the top metal number. i.e: for 4 metal layers process, Top Metal is Metal4, Metaln-1 means Metal3 and Vian-1 means Via3). FuseTop Layer determines area of the MIM.
Note
This option-B only supports 4 or more metal layers process. (For the 3 metal layers process, please refer to option-A). Customer will be need to chose either Option-A or Option B MIM in the design kit, Option-A and Option-B MIM can not be used in the same process.
RULE NO. |
DESCRIPTION |
LAYOUT RULE |
MIMTM.1 |
Minimum MiM bottom plate (1) spacing to the bottom plate metal (whether adjacent MiM or routing metal) |
1.2 |
MIMTM.2 |
Minimum MiM bottom plate (1) overlap of “Vian-1” layer [This is applicable for “Vian-1” within 1.06um oversize of FuseTop layer (referenced to virtual bottom plate)] |
0.4 |
MIMTM.3 |
Minimum MiM bottom plate overlap of Top plate |
0.6 |
MIMTM.4 |
Minimum MiM top plate (FuseTop) overlap of “Vian-1” |
0.4 |
MIMTM.5 |
Minimum spacing between top plate and the “Vian-1” connecting to the bottom Plate |
0.4 |
MIMTM.6 |
Minimum spacing between unrelated top plates |
0.6 |
MIMTM.7 |
Min FuseTop enclosure by CAP_MK |
0 |
MIMTM.8a |
Minimum MIM cap area (defined by FuseTop area) |
5*5um2 |
MIMTM.8b |
Maximum single MIM Cap area (Use multiple MIM caps in parallel connection if bigger capacitors are required) |
100*100um2 |
MIMTM.9 |
Min. Via (“Vian-1”) spacing for sea of Via on MIM top plate |
0.5 |
MIMTM.10 |
|
|
MIMTM.11 |
Bottom plate of multiple MIM caps can be shared (for common nodes) as long as total MIM area with that single common plate does not exceed “MIMTM.8b” rule. |
|
MIMTM.12* |
For MIM need to identify its’ length and width, use MIM_L_MK to mark MIM capacitor’s length |
|
Guideline |
There cannot be any sensitive matching analog circuitry underneath MIM. |
Note
Checked by virtual MiM bottom plate which defines as: ((FuseTop @1.06) AND (Metaln-1 interact FuseTop))
These two MIM option (option-A and option-B) not allowed used on same process.
