10.4.2 MIM Option B

This section describes rules for MiM (Metal-insulator-Metal) capacitor if MIM capacitor needs to be placed between “Top metal” & “Top metal-1”. FuseTop layer still used to defines the top plate of MiM capacitor and Metaln-1 layer defines MiM bottom plate (n>2, n is the top metal number. i.e: for 4 metal layers process, Top Metal is Metal4, Metaln-1 means Metal3 and Vian-1 means Via3). FuseTop Layer determines area of the MIM.

Note

This option-B only supports 4 or more metal layers process. (For the 3 metal layers process, please refer to option-A). Customer will be need to chose either Option-A or Option B MIM in the design kit, Option-A and Option-B MIM can not be used in the same process.

MIM Option B

RULE NO.

DESCRIPTION

LAYOUT RULE

MIMTM.1

Minimum MiM bottom plate (1) spacing to the bottom plate metal (whether adjacent MiM or routing metal)

1.2

MIMTM.2

Minimum MiM bottom plate (1) overlap of “Vian-1” layer [This is applicable for “Vian-1” within 1.06um oversize of FuseTop layer (referenced to virtual bottom plate)]

0.4

MIMTM.3

Minimum MiM bottom plate overlap of Top plate

0.6

MIMTM.4

Minimum MiM top plate (FuseTop) overlap of “Vian-1”

0.4

MIMTM.5

Minimum spacing between top plate and the “Vian-1” connecting to the bottom Plate

0.4

MIMTM.6

Minimum spacing between unrelated top plates

0.6

MIMTM.7

Min FuseTop enclosure by CAP_MK

0

MIMTM.8a

Minimum MIM cap area (defined by FuseTop area)

5*5um2

MIMTM.8b

Maximum single MIM Cap area (Use multiple MIM caps in parallel connection if bigger capacitors are required)

100*100um2

MIMTM.9

Min. Via (“Vian-1”) spacing for sea of Via on MIM top plate

0.5

MIMTM.10

  1. There cannot be any “Vian-2” touching MIM bottom plate “Metaln-1”

  2. MIM bottom plate “Metaln-1” can only be connected through the higher Via (“Vian-1”).

MIMTM.11

Bottom plate of multiple MIM caps can be shared (for common nodes) as long as total MIM area with that single common plate does not exceed “MIMTM.8b” rule.

MIMTM.12*

For MIM need to identify its’ length and width, use MIM_L_MK to mark MIM capacitor’s length

Guideline

There cannot be any sensitive matching analog circuitry underneath MIM.

Note

  1. Checked by virtual MiM bottom plate which defines as: ((FuseTop @1.06) AND (Metaln-1 interact FuseTop))

  2. These two MIM option (option-A and option-B) not allowed used on same process.

* Appendix B: Rules not coded

MIM Option B