10.11 0.18um MCU eFuse Design Rules¶
- This section describes the design rules for eFuse. Elements of eFuse are defined by PLFUSE layer (GDS# 125.5), LVS_Source layer (GDS# 100.8) and EFUSE_MK layer (GDS# 80.5), and definitions are as below:
Whole eFuse: (Poly2 interact with PLFUSE) inside EFuse_MK and Pplus
eFuse Link: (Poly2 and PLFUSE) inside EFUSE_MK
Anode: (Poly2 and LVS_Source) inside EFUSE_MK
Cathode: Poly2 inside EFUSE_MK not (LVS_Source or PLFUSE)
In normal application, eFuse Cathode is connected to program FET, program current flows from Anode to Cathode. After program, silicide migration happens and resistance will increase sharply.
RULE NO. |
DESCRIPTION |
LAYOUT RULE |
EF.01 |
Min. (Poly2 butt PLFUSE) within EFUSE_MK and Pplus |
0 |
EF.02 |
Min. Max. PLFUSE width |
0.18 |
EF.03 |
Min. Max. PLFUSE length |
1.26 |
EF.04a |
Min. Max. PLFUSE overlap Poly2 (coinciding permitted) and touch cathode and anode |
0 |
EF.04b |
PLFUSE must be rectangular |
|
EF.04c |
Cathode Poly2 must be rectangular |
|
EF.04d |
Anode Poly2 must be rectangular |
|
EF.05 |
Min. Max. LVS_Source overlap Poly2 (at Anode) |
0 |
EF.06 |
Min. Max. Cathode Poly2 width |
2.26 |
EF.07 |
Min. Max. Cathode Poly2 length |
1.84 |
EF.08 |
Min. Max. Anode Poly2 width |
1.06 |
EF.09 |
Min. Max. Anode Poly2 length |
2.43 |
EF.10 |
Min. Cathode Poly2 to Poly2 space |
0.26 |
EF.11 |
Min. Anode Poly2 to Poly2 space |
0.26 |
EF.12 |
Min. Space of Cathode Contact to PLFUSE end |
0.155 |
EF.13 |
Min. Space of Anode Contact to PLFUSE end |
0.14 |
EF.14 |
Min. EFUSE_MK enclose LVS_Source |
0 |
EF.15 |
NO Contact is allowed to touch PLFUSE |
|
EF.16a |
Cathode must contain exact number of Contacts at each ends |
4 |
EF.16b |
Anode must contain exact number of Contacts at each ends |
4 |
EF.17 |
Min. Space of EFUSE_MK to EFUSE_MK |
0.26 |
EF.18 |
PLFUSE must sit on field oxide (NOT COMP), no cross with any COMP, Nplus, ESD, SAB, Resistor, Metal1, Metal2 |
|
EF.19 |
Min. PLFUSE space to Metal1, Metal2 |
0 |
EF.20 |
Min. PLFUSE space to COMP, Nplus, ESD, SAB, Resistor |
2.73 |
EF.21 |
Min. Max. eFUSE Poly2 length |
5.53 |
EF.22a |
Min. Max. Cathode Poly2 overlap with PLFUSE in width Direction |
1.04 |
EF.22b |
Min. Max. Anode Poly2 overlap with PLFUSE in width Direction |
0.44 |
