10.13 YMTP_MK Mark Layer Rules¶
This layer is used to mark YMTP cell only. MTP cells with this marking layer should follow below specific rules which is different from 3.3V/(5V)6V rules. This layer is strictly not to be use for other purpose.
RULE NO. |
DESCRIPTION |
LAYOUT |
|
3.3V |
5V/6V |
||
|
Min. Nwell Space (Outside DNWELL, Inside YMTP_MK) [Different potential] |
1 |
1 |
Y.DF.4d |
(Nwell overlap of NCOMP) outside DNWELL (inside YMTP_MK) is allowed |
||
Y.DF.6 |
Min. COMP extend beyond gate (it also means source/drain overhang) inside YMTP_MK |
NA |
0.15 |
Y.DF.16 |
Min. space from (Nwell outside DNWELL) to (unrelated NCOMP outside Nwell and DNWELL) (inside YMTP_MK) |
0.27 |
0.23 |
Y.PL.1 |
Interconnect Width (inside YMTP_MK) |
0.13 |
NA |
Y.PL.2 |
Gate Width (Channel Length) (inside YMTP_MK) |
0.13 |
0.47 |
Y.PL.4 |
Poly2 extension beyond COMP to form Poly2 end cap (inside YMTP_MK) |
NA |
0.16 |
Y.PL.5a |
Space from field Poly2 to unrelated COMP (inside YMTP_MK) Spacer from field Poly2 to Guard-ring (inside YMTP_MK) |
0.04 |
0.2 |
Y.PL.5b |
Space from field Poly2 to related COMP (inside YMTP_MK) |
0.04 |
0.2 |
Y.PL.6 |
90 deg bends on the COMP are not allowed (except YMTP_MK) |
||
Y.LU.3 |
This rule is to check: (a) Max. Psub tap space to every point on the boundary of NCOMP outside NWELL. (b) For within 50um from the (NCOMP in Psub), Minimum NWELL to (NCOMP outside Nwell) space is defined as y, (c) If y <1.0um, then Max. Psub tap space to every point on the boundary of NCOMP outside NWELL. (inside YMTP_MK) |
20 |
NA |
Note
* Rules allowed minimum overlap and spacing are 0, so DRC deck will not check those rules