14.6.3 Metal Slotting rules

Use Metal1_Slot, Metal2_Slot, Metal3_slot, Metal4_Slot, Metal5_Slot and MetalTop_Slot (slot mark layers) to identify respective metal layer slotting area. These layers will be used to create the slots automatically (by logic operation) and there is no need to create physical holes (slots) in the routing metal lines. Below rule shall be followed for metal slotting layout.

Metal Slotting rules

RULE NO.	DESCRIPTION	LAYOUT RULE
MSLOT.1	Maximum metal width without slotting	30
MSLOT.2	Minimum slot width (slot mark layers)	2
MSLOT.3	Slot length (slot mark layers)
	Minimum	10
	Maximum	250
MSLOT.4	Slot space (slot mark layers)
	Minimum	10
	Maximum	30
MSLOT.5	Minimum slot (slot mark layers) to metal edge spacing	10
MSLOT.6	For multiple slots that spans the metal width, slots should be staggered.
MSLOT.7	Minimum space from via-n to metal-n slot	0.2
MSLOT.8	Minimum space from via-(n-1) / contact to metal-n slot	0.2
	MetalTop area directly under the Pad
	MIM bottom plate directly under FuseTop
	MetalTop directly under FuseWindow_D
	Metal3 area (for MIM top plate connection) directly enclosed by FuseTop
	MetalTop area directly under UBM layers
	Minimum distance to these layers	5
MSLOT.10	Slot mark layer on the metal hole (same metal level, e.g. Metal1_Slot on the Metal1 hole) are not allowed