6.2 MIM Capacitor

Three types of MIM-capacitor are offered; they are 2.0fF/um2, 1.5fF/um2, 1.0 fF/um2. Extra mask layer (L92) is required for the MIM Cap.

Note

One process is only allowed to use one type of MIM-capacitor; it is not possible to have more than one type of MIM Caps in the same process flow with just one masking step.

(a) 1.5 fF/um2 MIM CAP (<=6V application)

#	PARAMETERS	SLM_ID	DIMENSIONS / COMMENTS	MIN	TYP	MAX	UNITS
1	Capacitance	MIM2*	Zero bias capacitance from 350X50 sq. um capacitor.	1.27	1.5	1.73	fF/um2
2	Leakage current	MIM2*	@ V=6V	–	–	1	pA/um2
3	BVox	MIM2*	(@10uA)	10	30	–	V
4	Voltage Coefficient, Vc1	*Test Chip	@ V € (-6 – +6V)	5.7	7.6	9.5	ppm/V
5	Temp Coefficient (TC1)	*Test Chip	(@10uA)	9.9	13.3	16.6	ppm/K
6	Sheet res. bottom plate	*Test Chip		68	80	92	m./sq
7	Sheet res. top plate	*Test Chip		400	500	600	m./sq
8	Matching (adjacent capacitors)	*Test Chip	C = 1pF (Laid out as per characterization report guideline)	–	–	1	%
9	Max Operating voltage across MIM Cap	*Test Chip		–	–	10V	V

(b) 1fF/um2 MIM CAP (<=20V application)

#	PARAMETERS	SLM_ID	DIMENSIONS / COMMENTS	MIN	TYP	MAX	UNITS
1	Capacitance	MIM1	Zero bias capacitance from 350X50 sq. um capacitor.	0.9	1	1.1	fF/um2
2	Leakage current	MIM1	@ V=16V	–	–	1	pA/um2
3	BVox	MIM1	(@10uA)	20	40	–	V
4	Voltage Coefficient, Vc1	*Test Chip	@ V € (-6 – +6V)	4.5	6	7.5	ppm/V
5	Temp Coefficient (TC1)	*Test Chip			10	20	ppm/K
6	Sheet res. bottom plate	*Test Chip		68	80	92	m./sq
7	Sheet res. top plate	*Test Chip		400	500	600	m./sq
8	Matching (adjacent capacitors)	*Test Chip	C = 1pF (Laid out as per characterization report guideline)	–	–	1	%
9	Max Operating voltage across MIM Cap			–	–	20	V

(c) 2fF/um2 Single MIM CAP (<=6V application)

#	PARAMETERS	SLM_ID	DIMENSIONS / COMMENTS	MIN	TYP	MAX	UNITS
1	Capacitance	MIM2*	Zero bias capacitance from 350X50 sq. um capacitor.	1.8	2	2.2	fF/um2
2	Leakage current	MIM2*	@ V=6V	–	–	1	pA/um2
3	BVox	MIM2*	(@10uA)	10	24		V
4	Voltage Coefficient, Vc1	*Test Chip	@ V € (-6 – +6V)	–	-28.8	–	ppm/V
5	Temp Coefficient (TC1)	*Test Chip		–	18.8	–	ppm/K
6	Sheet res. bottom plate	*Test Chip		68	80	92	m./sq
7	Sheet res. top plate	*Test Chip		–	–	–	m./sq
8	Matching (adjacent capacitors)	*Test Chip	C = 1pF (Laid out as per characterization report guideline)	–	–	1	%
9	Max Operating voltage across MIM Cap			–	–	6.6	V