6.1B 2000 ohm/sq High Poly Resistor¶

2000ohm/sq High Poly Resistor require 1 extra mask layer (L63 Resistor)¶

#

PARAMETERS

SLM_ID

DIMENSIONS / COMMENTS

MIN

TYP

MAX

UNITS

1

Rsheet (Sheet Resistance)

SAB RES2

W = 10um (to monitor film Rs)

1600

2000

2400

□/sq

2

Temp. Coeff. TCR1

*Test Chip

W > 3um,

-1300

-1650

-1900

ppm/K

3

Voltage Coeff, VCR1

*Test Chip

W > 3um,

-100

-150

-200

ppm/V

Note

1000ohm/sq resistor and 2000ohm/sq resistor cannot coexist in a process.

#	PARAMETERS	SLM_ID	DIMENSIONS / COMMENTS	MIN	TYP	MAX	UNITS
1	Rsheet (Sheet Resistance)	SAB RES2	W = 10um (to monitor film Rs)	1600	2000	2400	□/sq
2	Temp. Coeff. TCR1	*Test Chip	W > 3um,	-1300	-1650	-1900	ppm/K
3	Voltage Coeff, VCR1	*Test Chip	W > 3um,	-100	-150	-200	ppm/V