5.0 General Specification (Resistor, Capacitor, Oxide, Junction and Parasitic NPN/PNP)ΒΆ 5.1 Sheet Resistance 5.2 Contact Resistance 5.3 Gate oxide capacitance 5.4 Oxide Breakdown Voltage 5.5 Junction Breakdown Voltage 5.6 Parasitic Capacitance 5.7 Temperature Coefficient 5.8 Vertical BJT Transistors