5.7 Temperature CoefficientΒΆ
#
PARAMETERS
XTORS
DIMENSIONS / COMMENTS
MIN
TYP
MAX
UNITS
7
TEMPERATURE COEFFICIENT
TC (Metal 1)
0.18um BEOL
0.28
0.33
0.38
%/degC
TC (Metal 2)
0.18um BEOL
0.28
0.33
0.38
%/degC
TC (Metal 3)
0.18um BEOL
0.28
0.33
0.38
%/degC
TC (Metal 4)
0.18um BEOL
0.28
0.33
0.38
%/degC
TC (Metal 5)
0.18um BEOL
0.28
0.33
0.38
%/degC
TC (Top Metal @ 6kA)
0.18um BEOL
0.3
0.35
0.4
%/degC
TC (Top Metal @ 9kA)
0.18um BEOL
0.31
0.37
0.43
%/degC
TC (Top Metal @ 11kA)
0.18um BEOL
0.31
0.37
0.43
%/degC
TC (Top Metal @ 30kA)
0.18um BEOL
0.33
0.39
0.45
%/degC
TC (Active Contact)
0.18um BEOL
0.062
0.073
0.084
%/degC
TC (Poly Contact)
0.18um BEOL
0.081
0.095
0.109
%/degC
TC ( Via1, Via2, Via3, Via4, Via5)
0.18um BEOL
0.091
0.107
0.123
%/degC