5.2 Contact Resistance¶
#
PARAMETERS
XTORS
DIMENSIONS / COMMENTS
MIN
TYP
MAX
UNITS
2
Contact Resistance
M1-Poly (salicided)
0.22 x0.22
–
5.9
15
Ω/cont
M1-N+ (salicided)
0.22 x0.22
–
6.3
15
Ω/cont
M1-P+ (salicided)
0.22 x0.22
–
5.2
15
Ω/cont
Via 1
0.26 x 0.26
–
4.5
15
Ω/via
Via 2
0.26 x 0.26
–
4.5
15
Ω/via
Via 3
0.26 x 0.26
–
4.5
15
Ω/via
Via 4
0.26 x 0.26
–
4.5
15
Ω/via
Via 5 (Top Via)
0.26 x 0.26
–
4.5
15
Ω/via