5.1 Sheet Resistance¶
#
PARAMETERS
XTORS
DIMENSIONS / COMMENTS
MIN
TYP
MAX
UNITS
1
Sheet Resistance
Wide N+ DIF (salicided)
5 um (measured @I=100uA)
1
6.3
15
Ω/sq
Wide P+ DIF (salicided)
5 um (measured @I=100uA)
1
7
15
Ω/sq
Wide N+ Poly (salicided)
5 um (measured @I=100uA)
1
6.8
15
Ω/sq
Wide P+ Poly (salicided)
5 um (measured @I=100uA)
1
7.3
15
Ω/sq
Wide N+ DIF (unsalicided)
5 um (measured @I=100uA)
45
60
75
Ω/sq
Wide P+ DIF (unsalicided)
5 um (measured @I=100uA)
145
185
225
Ω/sq
Wide N+ Poly (unsalicided)
5 um (measured @I=100uA)
250
310
370
Ω/sq
Wide P+ Poly (unsalicided)
5 um (measured @I=100uA)
280
350
420
Ω/sq
Wide Nwell (unsalicided)
5 um (measured @I=100uA)
800
1000
1200
Ω/sq
Metal 1
76
90
104
mΩ/sq
Metal 2
76
90
104
mΩ/sq
Metal 3
76
90
104
mΩ/sq
Metal 4
76
90
104
mΩ/sq
Metal 5
76
90
104
mΩ/sq
Top metal (9kA)
31
40
49
mΩ/sq
Top metal (6kA)
50
60
70
mΩ/sq
Top metal (11kA)
31
40
49
mΩ/sq
Top metal (30kA)
6
9.5
14
mΩ/sq