6.1C 3000 ohm/sq High Poly Resistor¶

3000ohm/sq High Poly Resistor require 1 extra mask layer (L63 Resistor)¶

#

PARAMETERS

SLM_ID

DIMENSIONS / COMMENTS

MIN

TYP

MAX

UNITS

1

Rsheet (Sheet Resistance)

SAB RES2

W = 10um (to monitor film Rs)

2250

3000

3750

□/sq

2

Temp. Coeff. TCR1

*Test Chip

W > 3um,

–

–

–

ppm/K

3

Voltage Coeff, VCR1

*Test Chip

W > 3um,

–

–

–

ppm/V

Note

Note: 1000ohm/sq resistor, 2000ohm/sq and 3000ohm/sq resistor cannot coexist in a process.

#	PARAMETERS	SLM_ID	DIMENSIONS / COMMENTS	MIN	TYP	MAX	UNITS
1	Rsheet (Sheet Resistance)	SAB RES2	W = 10um (to monitor film Rs)	2250	3000	3750	□/sq
2	Temp. Coeff. TCR1	*Test Chip	W > 3um,	–	–	–	ppm/K
3	Voltage Coeff, VCR1	*Test Chip	W > 3um,	–	–	–	ppm/V