6.1A 1000 ohm/sq High Poly Resistor¶

1000ohm/sq High Poly Resistor require 1 extra mask layer (L63)¶

#

PARAMETERS

SLM_ID

DIMENSIONS / COMMENTS

MIN

TYP

MAX

UNITS

1

Rsheet (Sheet Resistance)

SAB RES2

W = 10um (to monitor film Rs)

800

1000

1200

□/sq

2

Temp. Coeff. TCR1

*Test Chip

W > 3um,

-1200

-1000

-800

ppm/K

3

Voltage Coeff, VCR1

*Test Chip

W > 3um,

*

-200

*

ppm/V

#	PARAMETERS	SLM_ID	DIMENSIONS / COMMENTS	MIN	TYP	MAX	UNITS
1	Rsheet (Sheet Resistance)	SAB RES2	W = 10um (to monitor film Rs)	800	1000	1200	□/sq
2	Temp. Coeff. TCR1	*Test Chip	W > 3um,	-1200	-1000	-800	ppm/K
3	Voltage Coeff, VCR1	*Test Chip	W > 3um,	*	-200	*	ppm/V