3.27 1P4M (TM 30KA with MIM Option B) StructureΒΆ
MIM was placed in between Metal3 and Metal4 (TOP Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF
MIM was placed in between Metal3 and Metal4 (TOP Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF