4.0 Sheet Rho table

Layer	Stack	Rs(ohm/Squre)
M1	375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN	0.090+/-0.014
M2	375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN	0.090+/-0.014
M3	375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN	0.090+/-0.014
M4	375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN	0.090+/-0.014
M5	375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN	0.090+/-0.014
MIM Top Plate	TiN600AMIMAL2000ATiN350A	0.18+/-0.027
TM(6KA)	375IMPTi/300A101TiN/6KAL 10.6KW/50FTI250TIN	0.060+/-0.012
TM(9KA)	375IMPTi/300A101TiN/9KAL 10.6KW/50FTI250TIN	0.04+/-0.009
TM(11KA)	375IMPTi/300A101TiN/11KAL/250TIN	0.04+/-0.009
TM(30KA)	375IMPTi/300A101TiN/30KAL /250TIN	0.0083+/-0.004