1.0 NOTEΒΆ
This application note is intended as a user guide for IA BEOL options for GlobalFoundries FAB3E 0.18um 3.3/6V HIGH VOLTAGE CMOS Technology.
Technology parameters of all process options are provided.
IA specs are provided for the options of with/without MIM capacitor and options of 6KA or 9KA or 11KA or 30KA top metal layer.
4.1-4.4
for 1P3M (with/without MIM, 6KA TM/9KA TM)
4.5-4.8
for 1P4M (with/without MIM, 6KA TM/9KA TM)
4.9-4.12
for 1P5M (with/without MIM, 6KA TM/9KA TM)
4.13-4.16
for 1P6M (with/without MIM, 6KA TM/9KA TM)
4.17-4.18
for 1P4M (with MIM option B, 6KA TM/9KA TM)
4.19-4.20
for 1P5M (with MIM option B, 6KA TM/9KA TM)
4.21-4.22
for 1P6M (with MIM option B, 6KA TM/9KA TM)
4.23-4.24
for 1P3M (with/without MIM, 30KA TM)
4.25-4.27
for 1P4M (with/without MIM / MIM option B, 30KA TM)
4.28-4.30
for 1P5M (with/without MIM / MIM option B, 30KA TM)
4.31-4.33
for 1P6M (with/without MIM / MIM option B, 30KA TM)
4.34-4.35
for 1P3M (with/without MIM, 11KA TM)
4.36-4.37
for 1P4M (with/without MIM / MIM option B, 11KA TM)
4.38-4.39
for 1P5M (with/without MIM / MIM option B, 11KA TM)
4.40-4.41
for 1P6M (with/without MIM / MIM option B, 11KA TM)
4.42-4.44
for 1P4M/5M/6M (with MIM option B, 30KA TM)
4.45
for 1P2M (without MIN, 30KA TM)