1.0 NOTEΒΆ

This application note is intended as a user guide for IA BEOL options for GlobalFoundries FAB3E 0.18um 3.3/6V HIGH VOLTAGE CMOS Technology.

Technology parameters of all process options are provided.

IA specs are provided for the options of with/without MIM capacitor and options of 6KA or 9KA or 11KA or 30KA top metal layer.

4.1-4.4

for 1P3M (with/without MIM, 6KA TM/9KA TM)

4.5-4.8

for 1P4M (with/without MIM, 6KA TM/9KA TM)

4.9-4.12

for 1P5M (with/without MIM, 6KA TM/9KA TM)

4.13-4.16

for 1P6M (with/without MIM, 6KA TM/9KA TM)

4.17-4.18

for 1P4M (with MIM option B, 6KA TM/9KA TM)

4.19-4.20

for 1P5M (with MIM option B, 6KA TM/9KA TM)

4.21-4.22

for 1P6M (with MIM option B, 6KA TM/9KA TM)

4.23-4.24

for 1P3M (with/without MIM, 30KA TM)

4.25-4.27

for 1P4M (with/without MIM / MIM option B, 30KA TM)

4.28-4.30

for 1P5M (with/without MIM / MIM option B, 30KA TM)

4.31-4.33

for 1P6M (with/without MIM / MIM option B, 30KA TM)

4.34-4.35

for 1P3M (with/without MIM, 11KA TM)

4.36-4.37

for 1P4M (with/without MIM / MIM option B, 11KA TM)

4.38-4.39

for 1P5M (with/without MIM / MIM option B, 11KA TM)

4.40-4.41

for 1P6M (with/without MIM / MIM option B, 11KA TM)

4.42-4.44

for 1P4M/5M/6M (with MIM option B, 30KA TM)

4.45

for 1P2M (without MIN, 30KA TM)