3.24 1P3M (TM 30KA with MIM) StructureΒΆ
MIM was placed in between Metal2 and Metal3 (Top Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF
MIM was placed in between Metal2 and Metal3 (Top Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF