2.2 General Dielectric Layer Table for simulation

Dielectric Layer	Thickness (um) for Typical Capacitance	Thickness (um) for the Best Capacitance	Thickness (um) for the Worst Capacitance	Dielectric Constant
Nit_pasvn	0.3	0.27	0.33	7
Oxd_pasvn (6KA)	1.4025	1.5425	1.2625	4
Oxd_pasvn (9KA)	2.0025	1.8028	2.2022	4
Oxd_pasvn (11KA)	2.3	2	2.6	4
Oxd_pasvn (30kA)	3.3	3	3.6	4
IMD5 (with MIM)	1.45	1.537	1.363	4
IMD5	1.15	1.219	1.081	4
IMD4 (with MIM)	1.45	1.537	1.363	4
IMD4	1.15	1.219	1.081	4
IMD3 (with MIM)	1.45	1.537	1.363	4
IMD3	1.15	1.219	1.081	4
IMD2 (with MIM)	1.45	1.537	1.363	4
MIM_SIN (1.5fF)	0.042	0.05	0.03	7
MIM_SIN(1.0fF)	0.062	0.07	0.05	7
IMD2	1.15	1.219	1.081	4
IMD1	1.15	1.219	1.081	4
ILD	0.86	0.95	0.77	4
Nitr liner	0.05	0.0525	0.0475	7
STI	0.32	0.368	0.272	4