3.10 1P5M (TM 6KA with MIM) Structure
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MIM was placed in between Metal2 and Metal3; SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF

.. image:: images/2_cross_section_10.png
   :width: 600
   :align: center
   :alt:  1P5M (TM 6KA with MIM) Structure